Design for Emerging
    and Nanoscale
    Manufacturing:
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  • Computed axial lithography (CAL)

  • Microscale CAL printing of silica glass

  • Tomographic schlieren imaging for CAL

  • SpaceCAL: CAL in microgravity

  • Three-dimensional holographic lithography (3DHL)

  • Nanoimprint lithography process modeling

  • Diffractive inline optical metrology

  • Nanocaliper for thin film rheology (nanovisc)

  • Manufacturing of polymeric microfluidic devices

  • Materials testing for microsystems fabrication

  • Simulation of deep silicon plasma etch (adriene)