(Taken from the UC Berkeley Course Guide)
This hands-on laboratory course focuses on the mechanical engineering principles that underlie the design, fabricaton, and operation of micro/nanoscale mechanical systems, including devices made by nanowire/nanotube syntheses; photolithography/soft lithography; and molding processes. Each laboratory will have different focuses for basic understanding of MEMS/NEMS systems from prototype constructions to experimental testings using mechanical, electrical, or optical techniques.
EE 16A or 40, Physics 7B, ME 106, (ME119 or ME118 are highly recommended but not mandatory)
Spring only
2 hours of lecture and 3 hours of laboratory per week.